COATING DEVICE,申请号JP19870234810-传众专利搜索

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法人/股东/高管

发明名称	COATING DEVICE
摘要
申请公布号	JPS6480470(A)	申请公布日期	1989.03.27
申请号	JP19870234810	申请日期	1987.09.21
申请人	HITACHI LTD	发明人	CHIBA TADAHIDE;NEMOTO KAZUNORI;TSUKAMOTO HIROYUKI
分类号	B05C11/08;G03F7/16;H01L21/027;H01L21/30	主分类号	B05C11/08
代理机构		代理人
主权项
地址

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