| 摘要 |
PURPOSE:To effectively use an effective exposure region and cope with the tendency to increasing chip size, by making the configuration of the chip region for pattern formation into a hexagon or a polygon having more sides. CONSTITUTION:In an IC chip which is a polygon more than hexagon, when a chip pattern of an octagon is made in an effective exposure region on an IC chip shaped in a polygon having six or more sides, a region in which a pattern is formed the region for pattern formation is defined by an octagon which is made by the four sides of a straight line section showing the effective exposure region corresponding to the outlines of a reticule and by the remaining four sides made by connecting an effective exposure region by straight lines. As a result, the octagon except for not-used effective exposure regions 6 of crescent-shaped parts shown by slanting lines, becomes effective exposure region, with the result that the not-used effective exposure region 6 is considerably decreased and the enlargement of the IC chip is implemented. As a result, it is possible to effectively use the effective exposure region 6 and cape with the tendency to increasing chip size without causing the enlargement of the aperture of a reduced lens. |
