| 摘要 |
PURPOSE:To provide a laser reflecting mirror capable of reflecting with high reflectance both weak guiding laser having a wavelength lambda in the visible region and high-output laser having a wavelength different from lambda by 0.1 lambda or above, by providing a metallic layer on a substrate, and providing, on the metallic layer, a dielectric multilayer film consisting of thirteen or more dielectric films deposited one on another. CONSTITUTION:A substrate 5 is provided by an optical glass optically polished to lambda/10 (lambda=0.6328mum), and silver is deposited on the substrate 5 to form a metallic film 10. In order to reflect a YAG laser with high reflectance, fifteen SiO2 films and fourteen TiO2 films are deposited altenately one on another to provide a dielectric multilayer film 6. Finally, in order to reflect excimer laser with high reflectance, fifteen Al2O3 films and fourteen mgF2 films are deposited alternately one on another to provide the dielectric multilayer film 6. A laser reflecting mirror thus constructed can achieve reflectance as high as 99.99% or more for excimer and YAG lasers and 98.4% or more for He-Ne lasers. |
