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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6476739(A)
申请公布日期
1989.03.22
申请号
JP19870232317
申请日期
1987.09.18
申请人
NEC CORP
发明人
KOTAKI HIROSHI
分类号
H01L21/04;H01L21/3205;H01L21/768;H01L23/52
主分类号
H01L21/04
代理机构
代理人
主权项
地址
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