| 摘要 |
PURPOSE:To prevent solid materials, which are generated in or brought into a treating liquid piping, from sticking to a matter to be treated by automatically carrying out a washing operation to clean out the solid materials etc., in accordance with a generator condition of foreign matters such as solid materials in the piping. CONSTITUTION:A treating section 2, wherein a specified treatment is carried out by supplying a treating liquid to a matter 7 to be treated, is connected with a treating liquid reservoir 1 by way of a piping 5. A detector 11, which is set in the middle of the piping 5, detects an amount of solid materials in the piping 5. A washing operation is carried out by supplying a washing liquid from a washing liquid reservoir 3 to the piping 5, and a waste liquid formed in the piping 5 during the aforementioned washing operation is recovered in a waste liquid reservoir 4. A control section 13, which is connected with the detector 11, controls the washing operation in accordance with the amount of solid materials in the piping 5. By using this apparatus, it is possible to prevent perfectly the solid materials, which are generated in or brought into the treating liquid supply path, from ticking to the matter to be treated. |
