| 摘要 |
PURPOSE:To obtain the thin film magnetic head of a stable dimension without widely increasing a working manday and a working time by forming a protecting layer on a magnetic gap layer and a first insulating layer, removing an unnecessary film by means of an energy particle and, thereafter, selecting- removing the protecting layer chemically. CONSTITUTION:After a protecting layer 10 made of the same material as that of a coil 6 is formed to one part of a magnetic gap layer 2 and a first insulating layer 3, an etching by the energy particle such as an argon is executed, and after the etching, the protecting layer 10 is removed. Namely, since the magnetic gap layer 2 and the first insulating layer 3 are protected at the time of the etching by the energy particle such as the argon, a dimensional change due to an over-etching can never be generated. When the protecting layer 10 is formed simultaneously with the coil 6, only the number of processes to remove the protecting layer is increased, and the stable magnetic head can be obtained without widely increasing the intricacy of the work and the working time. |
