Process and device for the vapour deposition of graded-light filter layers on transparent plates

摘要

A process for the vapour deposition of in each case one graded-light filter layer in the form of a circular surface, with a density decreasing radially outwards in predetermined gradation, on transparent plates in a vacuum vapour deposition unit, in which, by means of a planetary gear, the plates are rotated about a central axis of the vapour deposition unit and, upstream of each plate in the direction of vapour deposition, a vapour deposition template with a central orifice bounded by a curviform rim is rotated with the plate and additionally about the vapour deposition template's own axis, is designed in such a way that a vapour deposition template (9) is used which has an orifice with a star-shaped rim (9b) having a number (n) of star teeth (9a) greater than 2, that mutually identical envelope curves (9b), mutually arranged as mirror images, are used as flanks (9b) for the star teeth (9a), and that the characteristic rotation time (Tas) of the vapour deposition template (9) is approximately equal to or greater than 0.1 second and, at the same time, is reduced by a factor of 1/n relative to the characteristic rotation time of a vapour deposition template, to be used in the same vapour deposition unit (1), having a rim curve which continuously rises or falls over 360@. <IMAGE>