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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6471150(A)
申请公布日期
1989.03.16
申请号
JP19870226427
申请日期
1987.09.11
申请人
FUJITSU LTD
发明人
TAKAGI HIDEO
分类号
H01L21/3205;H01L21/28;H01L23/52;H01L29/43
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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