发明名称 VIBRATION SENSOR
摘要 A vibration sensor (K) including a piezoelectric vibrator (3) constituted by a pair of plate-like piezoelectric elements (1,2) bonded to each other with the polarization axis aligned in the direction of the thickness. The vibration sensor (K) further includes a vibrator (5) of a bending vibration mode, which is subject to resonance at a predetermined frequency and is locally provided in the piezoelectric vibrator (3) such that a portion of the piezoelectric vibrator (3), disposed peripherally of the vibrator (5) of the bending vibration mode, is fixedly supported.
申请公布号 DE3379175(D1) 申请公布日期 1989.03.16
申请号 DE19833379175 申请日期 1983.07.23
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 FUKADA, TETSUJI;ISE, YUKIHIKO
分类号 G01H11/08;G01H13/00;H01L41/113;(IPC1-7):G01H1/00 主分类号 G01H11/08
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