| 摘要 |
PURPOSE:To make discharge plasma stable and spatially uniform, by sealing laser gas for generating plasma by microwave discharge, in a space between a conductor wall formed in a part of a microwave circuit and dielectric facing said wall, forming a microwave mode having an electric component vertical to the boundary with the generated plasma, and constituting a part of a micro wave transmission line by an electromagnetic horn. CONSTITUTION:Microwave generated by a magnetron 3 travels a waveguide 4, and is expanded by a waveguide horn 6. By matching impedance with a microwave coupling window 6, the microwave traveling here is three dimensionally expanded, and supplied in the axial direction, from the whole side surface of the microwave circuit being a laser head. The laser head part 2 has a ridge cavity shape, and the microwave concentrates in the vicinity of the ridges 21, 22, to generate very intense microwave electromagnetic field. By this intense microwave electromagnetic field, laser gas sealed in a discharge space 25 is subjected to discharge breakdown. Thus, plasma is generated, and laser medium is excited. |
