| 摘要 |
PURPOSE:To generate spatially uniform plasma, and improve cooling efficiency, by arranging a first conductor wall with conductivity higher than plasma, which wall faces dielectric being a microwave incident window, and circulating laser gas in a space via the first conductor wall, the dielectric and the second conductor wall which are air-permeable. CONSTITUTION:By intense microwave electromagnetic field being generated so as to concentrate in the vicinity of ridges 21, 22, laser gas such as carbon dioxide gas laser gas sealed in a discharge space 26 is subjected to discharge breakdown, plasma is generated, and laser medium is excited. since the first conductor wall 23 and the second conductor wall 25 are constituted in a honeycomb structure, the laser gas is circulated via the first conductor wall 23, the dielectric 24, and the second conductor wall 25, and microwave is reflected. The discharge space 26 is formed between the conductor wall 23 and the dielectric 24 which is arranged so as to face the conductor wall 23 and serves as an incident window of microwave. In this discharge space 26, microwave discharge is generated, and the microwave enters only from the one side surface of plasma, thereby, enabling the discharge by a desired microwave mode. |
