| 摘要 |
PURPOSE:To produce microwave discharge plasma into spacially even one including the direction of the optical axis of a laser by a method wherein laser gas is encapsulated between a conductor wall constituting part of a microwave circuit and a dielectric opposed to this conductor wall, the dielectric is used as a microwave incident window, a mode of a microwave having an electric field component vertical to the boundary between the dielectric and generated plasma is incided and an inductive microwave circuit element is mounted to the transmission path of the microwave and the coupling part of the circuit. CONSTITUTION:The discharge of laser gas encapsulated in a discharge space 26 is broken, plasma is generated and a laser medium is excited. A mode of a microwave having an electric field component vertical to the boundary between a dielectric 25 and the plasma is formed by a microwave circuit. As the dielectric 25 and a conductor wall 24 oppose to each other, an electric field to penetrate the plasma is formed and spacially even discharge plasma is generated. As the energy of the microwave is stored in a metallic piece 28 that exists on ridges 21 and 22, which are respectively the transmission path of the microwave and the coupling part of the circuit, and is used as an inductive microwave circuit element, spacially even discharge is made possible including the direction of the optical axis of a laser. |
