| 发明名称 |
Evaporation source with a shaped nozzle |
| 摘要 |
An evaporation source in which an evaporation material is vaporized and jetted through a nozzle having a gradually opening cross-section, whereby the size of atom clusters of the jetted vapor can be controlled.
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| 申请公布号 |
US4812326(A) |
申请公布日期 |
1989.03.14 |
| 申请号 |
US19870014318 |
申请日期 |
1987.02.13 |
| 申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
TSUKAZAKI, HISASHI;YAMANISHI, KENICHIRO;YASUNAGA, SEIJI |
| 分类号 |
C23C14/32;B05B1/24;B05B5/025;C23C14/22;C23C14/24;(IPC1-7):B05D3/06;B05B5/02;C23C16/00 |
主分类号 |
C23C14/32 |
| 代理机构 |
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代理人 |
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| 主权项 |
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