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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6465851(A)
申请公布日期
1989.03.13
申请号
JP19870223324
申请日期
1987.09.07
申请人
TOSHIBA CORP
发明人
SHINAGAWA TAKESHI;MATSUKAWA HISAHIRO
分类号
H01L21/3205;H01L21/28
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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