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发明名称
FORMATION OF THIN SILICON NITRIDE FILM
摘要
申请公布号
JPS6462456(A)
申请公布日期
1989.03.08
申请号
JP19870216106
申请日期
1987.08.29
申请人
NISSIN ELECTRIC CO LTD
发明人
INOUE DAISUKE;TAKANO SHINICHI;NOGAWA SHUICHI
分类号
C23C14/06;C23C14/46
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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