发明名称 ILLUMINATOR
摘要 PURPOSE:To uniformize illuminance distribution on a surface to be projected by installing a spherical aberration varying part on a part of the optical path of a lighting system, moving a member which is a part of said varying part based on a measured value from a illuminance measuring instrument and varying the spherical aberration. CONSTITUTION:A luminous flux from a light source is condensed by an oval mirror 2 and made incident on the spherical aberration varying part 4. In the varying part 4, its incident slope 4a is positioned near a 2nd focal point of the mirror 2 and the luminous flux projected from a fine lens constituting its projectile surface 4b is superposed to be projected on the surface 7 to be projected by a condenser lens 6. The variation of the illuminance distribution on the surface 7 is inputted in a driving part 5 from the illuminance measuring instrument 8 as an output signal. The driving part 5 moves the lens unit in center of the varying part 4 up and down so as to vary the spherical aberration of the lens 6. Then, the illuminance distribution can be measured and the spherical aberration can be adjusted, so that the illuminance distribution on the surface 7 can be uniformized.
申请公布号 JPS6461716(A) 申请公布日期 1989.03.08
申请号 JP19870218789 申请日期 1987.08.31
申请人 CANON INC 发明人 OTA MASAKATSU
分类号 G02B19/00;G03F7/20;H01L21/027 主分类号 G02B19/00
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