| 摘要 |
PURPOSE:To provide the titled target assembly parts which do not generate target warpage and have large heat transferability by interposing a sub-backing made of graphite between a ceramics target and backing plate. CONSTITUTION:The sub-backing plate 2 made of the graphite having the coefft. of thermal expansion approximate to the coefft. of thermal expansion of a target material is interposed between the ceramics target 1 and the backing plate 4, by which the desired target assembly parts 5 for ceramics sputtering are obtd. Namely, the above-mentioned sub-backing plate 2 has the coefft. of thermal expansion approximate to the coefft. of thermal expansion of the target 1, and therefore, the generation of residual stress in the target material 1 is obviated and the warpage is hardly generated. The generation of cracks during the sputtering operation is thereby extremely decreased. |
