发明名称 Method and apparatus for optical examination of an object particularly by moire ray deflection mapping
摘要 A method and apparatus for moire ray deflection mapping for determining properties of an object in which a point source of light producing a diverging beam of direct light is passed through a first optical system including the object to be examined, which system retraces the light in the form of a converging beam of reflected light from the examined object back towards the point source. The converging beam of reflected light is intercepted before reaching the point source and is passed through a second optical system which collimates the beam of reflected light. The collimated beam is then directed through first and second gratings at a preselected angular orientation with respect to each other to produce moire fringe patterns providing an indication of the properties of the examined object. An important advantage in the above novel method is that the same setup can be used for measurements of both phase objects and specular surfaces.
申请公布号 US4810895(A) 申请公布日期 1989.03.07
申请号 US19880154469 申请日期 1988.02.08
申请人 ROTLEX OPTICS LTD. 发明人 KAFRI, ODED;GLATT, ILANA
分类号 G01N21/41;G02B27/60;(IPC1-7):G01N15/06 主分类号 G01N21/41
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