| 摘要 |
PURPOSE: To allow a plate-like blank to be put in and taken out continuously between the atmospheric pressure space and vacuum chamber by passing the blanks between a pair of elastic members, disposed in a cavity located between the atmospheric pressure space and vacuum chamber and forming rotary seals on the elastic members. CONSTITUTION: The method of moving a blank 10, having two major-surfaces between the atmospheric pressure space and vacuum chamber comprises passing the blank 10 between a pair of elastic members 44, 45 mounted in cavities 42, 43, having walls 48, 49 defined by spaces 40, 41, 46, 47, surrounded between the atmospheric pressure space and vacuum chamber and forming rotary seals on the elastic members, so that the members 44, 45 form rotary seals during passing of the blank 10 with at least one of the cavity walls 48, 49 and blank 10. The blank is, e.g. a printed circuit board panel and elastic members are rubber, vinyl, Teflon(R) (polytetrafluoroethylene) or other elastomer hollow cylindrical tube.
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