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经营范围
发明名称
DRYING OF WORK
摘要
申请公布号
JPS6453549(A)
申请公布日期
1989.03.01
申请号
JP19870211192
申请日期
1987.08.25
申请人
SUPIIDE FUAMU CLEAN SYST KK
发明人
TSUCHIDA SHIGENORI
分类号
H01L21/304;F26B3/32
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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