| 摘要 |
PURPOSE:To produce the title target without a sintering process by incorporating powder materials into pellets made of an element selected from multi-element oxides, pressing the mixture, and using the pressed body as a target along with the pellets. CONSTITUTION:In the target of Y-Ba-Cu oxide, etc., for forming a thin film, a pellet 1 is firstly produced from an appropriate element such as the Cu in the multi-element oxide. A mixed material, wherein the powder of Y2Cu2O5, BaCuO2, CuO, etc., are sufficiently mixed, is incorporated into the pellet 1 to obtain an optional composition. The mixture is pressed by a pressing rod 3, and the pellets 1 as such are fixed in a sputtering device. The target can be formed by this method without sintering. Since the material for the pellet 1 is selected from the materials in the target, the mixing of impurities into the thin film can be prevented. |
