| 摘要 |
PURPOSE:To obtain a laser marking device which eliminates the replacement of a mask and which can accurately mark in a wide area in a short time by deflecting a laser light passing a rotary mask by a deflecting optical system, and marking by altering the irradiating position of the light to an object. CONSTITUTION:When a mark is formed, a set (a) of masks of the shape that mark parts 1'-4' divided into four are sequentially arranged in the order of 1'-4' is formed, and sets (b), (c), (d) similar to the set (a) are arranged circumferentially on the surface of a rotary mask 8 to construct the rotary mask 8. A laser light from a laser light generator 1 is altered by an incident mirror 2 in its propagating direction, shaped by a shaper 3, and radiated to the mask 8. When the mark 8 is, for example, rotated clockwise, the laser light limited to a predetermined range passes the mask 8 according to the rotations of the sets (a)-(d) of the masks. The passed lights are altered in the direction by propagating direction altering mirrors 11, 12, and irradiated to a predetermined position on the surface of a semiconductor device 7 by a focusing lens 13 to be marked. |
