| 摘要 |
PURPOSE:To form a superconductive film with goon quality by depositing a compound film containing two kinds of specific elements and Cu on a substrate coated with a crystalline thin film and forming the crystalline film with zirconia or its compound. CONSTITUTION:A crystalline film 12 is formed on a substrate 11, and an oxide film 12 containing the element A, element B, and Cu at the mole ratio of elements of 0.5<=[(A+B)/Cu]<=2.5 is deposited on the film 12, the crystalline film 12 is formed with zirconia or its compound, where A is at least one kind of element among Sc, Y, and lanthanoide series elements. A superconductive film with good quality is thereby obtained. |
