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发明名称
HEAT TREATMENT OF III-V SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPS6450522(A)
申请公布日期
1989.02.27
申请号
JP19870208713
申请日期
1987.08.21
申请人
NEC CORP
发明人
KUZUHARA MASAAKI;KONO MICHIHISA
分类号
H01L21/26
主分类号
H01L21/26
代理机构
代理人
主权项
地址
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