| 摘要 |
<p>PURPOSE:To provide a semiconductor element transport device with easy adjustment and good accuracy by incorporating a number of ultrasonic vibrators to the transport surface of a rail having steps for placing of objects, and by allowing the amplitude of each vibrator to vary in a wave form with time series. CONSTITUTION:A control device 5 gives a signal to each ultrasonic vibrator 4, and its amplitude is varied in a wave form with time series. Thereby a lead frame 3 is transported in a certain direction. This provides easy adjustment and changeover of the transport amount, prevent objects and the rail from damages, and enhances the accuracy.</p> |
