| 摘要 |
PURPOSE:To make the diameter of a polygon mirror small and to miniaturize a device by scanning an objective substance with the 1st surface of a polygon mirror, reflecting the reflected light which is made incident on the 2nd surface through a plane mirror and detecting it by a multielement detector through a condensing lens. CONSTITUTION:The polygon mirror 2 with a tilt angle, which installs 1-4 surfaces and 1'-4' surfaces, scans the objective substance 1 and the reflected light which is made incident on the surface 1 is made incident on the plane mirror 8. Moreover the reflected light is made incident on the surface 2 and reflected to be condensed by the condensing lens 3, then detected by the detector 4 which has plural light detecting elements. Since the rotational angle of the polygon mirror 2 is theta, the respective scanning angles on the surface 1 and the surface 2 become 2theta and the scanning angle on the visual field surface of the substance 1 becomes 4theta. Then the diameter of the polygon mirror can be made small because it will do that the rotational angle of the polygon mirror is 1/2theta in order to obtain the same scanning angle. And when the diameter is made same as a conventional one, the polygon mirror can be made more polygonal and scanning rate and resolution can be improved. |
