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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6448444(A)
申请公布日期
1989.02.22
申请号
JP19870204070
申请日期
1987.08.19
申请人
HITACHI LTD;HITACHI MICRO COMPUT ENG LTD
发明人
TAKAHASHI HIDEKAZU
分类号
H01L21/76;H01L21/316;H01L21/822;H01L27/04
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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