发明名称 ELECTRIC CONNECTION STRUCTURE BETWEEN METAL WIRE AND BONDING PAD AND METHOD OF OBTAINING THE SAME
摘要 PURPOSE: To improve reliability in adhesion and bonding by mutually adhering an aluminum bonding pad doping copper and a metal wire doping copper. CONSTITUTION: For electric connection to a copper dope aluminum material for forming the bonding pad in a semiconductor device, the copper-doped metal wire is formed with concentration roughly in a range of 100ppm to 10000ppm, and this metal wire is electrically connected with the copper dope aluminum material. Thus, hardness of metalization can be improved and when the metal wire is bonded to the aluminum doped with copper, that bonding effect is enhanced.
申请公布号 JPS6448435(A) 申请公布日期 1989.02.22
申请号 JP19880099264 申请日期 1988.04.21
申请人 TEXAS INSTR INC <TI> 发明人 RICHIYAADO EMU BURUTSUKU;TOOMASU EICHI RAMUZEI
分类号 H01L21/60;H01L21/607;H01L23/49;H01L23/532 主分类号 H01L21/60
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