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发明名称
TESTING OF INTEGRATED CIRCUIT
摘要
申请公布号
JPS6447975(A)
申请公布日期
1989.02.22
申请号
JP19870204167
申请日期
1987.08.19
申请人
NEC CORP
发明人
KATO HIDEAKI
分类号
H01L21/66;G01R31/28;G01R31/3185
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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