Inspection system for array of microcircuit dies having redundant circuit patterns,申请号US19870060090-传众专利搜索

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发明名称	Inspection system for array of microcircuit dies having redundant circuit patterns
摘要
申请公布号	US4806774(A)	申请公布日期	1989.02.21
申请号	US19870060090	申请日期	1987.06.08
申请人	INSYSTEMS, INC.	发明人	LIN, LAWRENCE H.;CAVAN, DANIEL L.;HOWE, ROBERT B.
分类号	G01B11/24;G01N21/88;G01N21/956;H01L21/66;(IPC1-7):G02B27/42	主分类号	G01B11/24
代理机构		代理人
主权项
地址

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