发明名称 |
Apparatus utilizing charged particles |
摘要 |
An apparatus utilizing charged particles comprises a means for generating charged particles which are irradiated on the surface of a material and a means for generating plasma in the neighborhood of the surface of the material. The plasma generated by the plasma generating means can neutralize incident charge, to prevent an accumulation of the charge on the surface of the material.
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申请公布号 |
US4806829(A) |
申请公布日期 |
1989.02.21 |
申请号 |
US19870078086 |
申请日期 |
1987.07.27 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
NAKAO, SHUJI |
分类号 |
H01L21/302;C23C14/22;C23C14/48;H01J37/02;H01J37/317;H01J37/32;H01L21/265;H01L21/3065;(IPC1-7):H01J37/256 |
主分类号 |
H01L21/302 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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