FORMATION OF METALLIC WIRING OF SEMICONDUCTOR DEVICE,申请号JP19870203783-传众专利搜索

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发明名称	FORMATION OF METALLIC WIRING OF SEMICONDUCTOR DEVICE
摘要
申请公布号	JPS6446953(A)	申请公布日期	1989.02.21
申请号	JP19870203783	申请日期	1987.08.17
申请人	MITSUBISHI ELECTRIC CORP	发明人	MATSUDA SHUICHI;YONEDA MASAHIRO
分类号	H01L23/52;H01L21/3205	主分类号	H01L23/52
代理机构		代理人
主权项
地址

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