FREMGANGSMAATE TIL IONISK ETSING VED LAV POLARISASJONSSPENNING VED TILFOERING AV INERT GASS.,申请号NO19880003658-传众专利搜索

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发明名称	FREMGANGSMAATE TIL IONISK ETSING VED LAV POLARISASJONSSPENNING VED TILFOERING AV INERT GASS.
摘要
申请公布号	NO883658(A)	申请公布日期	1989.02.20
申请号	NO19880003658	申请日期	1988.08.17
申请人	L'AIR LIQIUDE - SA L'ETUDE L'EXPLOITATION PROC G CLAUDE	发明人	RUFIN, DENIS;HIRASE, IKUO
分类号	H01L21/302;C23F4/00;H01L21/3065;H01L21/311;(IPC1-7):H01L21/306	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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