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发明名称
SEMICONDUCTOR SUPERLATTICE STRUCTURE
摘要
申请公布号
JPS6445113(A)
申请公布日期
1989.02.17
申请号
JP19870202376
申请日期
1987.08.13
申请人
SHIOTANI SHIGEO;MITA AKIRA;MARUYAMA SUSUMU;ISHIBASHI SHINICHIRO
发明人
MITA AKIRA;MARUYAMA SUSUMU;ISHIBASHI SHINICHIRO;SHIOTANI SHIGEO
分类号
C30B23/08;C30B29/48;H01L21/20;H01L21/203;H01L21/26;H01L21/36
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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