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发明名称
WAFER SETTING DEVICE
摘要
申请公布号
JPS6444038(A)
申请公布日期
1989.02.16
申请号
JP19870201302
申请日期
1987.08.12
申请人
TOSHIBA CORP
发明人
KIMURA SHIGEKI
分类号
H01L21/302;H01L21/3065;H01L21/673;H01L21/68
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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