发明名称 ROBOT DEVICE
摘要 <p>PURPOSE:To make the entire device small in size by a method wherein a slider, with which a rotatory movement is converted into a linear movement by interlicking an arm to a driving rotary shaft, is provided and the material to be treated is always moved up and down vertically against the working position or a treatment vessel. CONSTITUTION:The gear 47 attached to a rotating shaft 39 is engaged with a follower gear 48, a roll 49 is attached to the follower gear 48, an almost L-shaped slider 51, equipped with a longitudinal groove 50 in which the roll 49 will be fitted, is dropped into the guide groove 9a on a substrate 9. Besides, the slider 51 is provided in a freely slidable manner through the intermediaries of a slider base 52, attached to the substrate, and a cross-roller bearing mechanism 51a, and one end of a rack 26 is fixed to the slider 51. Accordingly, the slider 51 performs a sliding movement in synchronization with the conveying speed in association with the rotation of a rotating shaft 39, and the driving is transmitted to the second clutch mechanism 23 through the rack 26. As a result, when the slider 51 is shifted by the rotation of the follower gear 48, the material to be treated comes down almost vertically to the first treatment vessel.</p>
申请公布号 JPS6442834(A) 申请公布日期 1989.02.15
申请号 JP19870199102 申请日期 1987.08.11
申请人 SAN METSUKU:KK 发明人 TAKAI KAORU;UENO SATOSHI
分类号 H01L21/677;B25J15/00;H01L21/68 主分类号 H01L21/677
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