| 摘要 |
<p>PURPOSE:To surely and easily confirm each wafer number of wafers mounted on a carrier by a method wherein the wafers are held at heights which differ gradually in accordance with a grade formed at a lifter. CONSTITUTION:While each orientation flat 2a has touched a positioning roller 4, all wafers 2 are positioned. Then, if a lifter 5 is raised, a highest part of the lifter 5 first touches the wafer 2 at a right end; if the lifter 5 is raised further, the wafers 2 touch the lifter 5 one after another and are lifted. If a whole lifting stroke of the lifter 5 is raised completely in this manner, the wafers 2 are held at heights which differ from one another in accordance with a grade of the lifter 5. By this setup, it is possible to confirm each wafer number 2b without touching the wafers 2.</p> |
