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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6442153(A)
申请公布日期
1989.02.14
申请号
JP19870198106
申请日期
1987.08.10
申请人
TOSHIBA CORP
发明人
KUBOTA YUKO;HAYASHI NOBUO;NAKANO HIROTAKA
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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