| 摘要 |
PURPOSE:To keep a wire unoxidized and to conduct highly reliable wire bonding with good reproducibility by preparing unoxidation atmosphere for the gas atmosphere of a spool container which contains a spool by feeding inert gas. CONSTITUTION:Inert gas is fed for the gas atmosphere of a spool container 24 to prevent oxidization of a wire 8 which is wound to a spool 20 in wire bonding equipment. Due to the unoxidized atmosphere of the spool container 24, a wire is kept unoxidized independent of operating frequency of wire bonding equipment or consumption speed of a wire. Therefore, a ball formed at the tip of a wire is usually spheral, and yet soft thus not causing chip damage. |
