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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6439732(A)
申请公布日期
1989.02.10
申请号
JP19870196612
申请日期
1987.08.06
申请人
SEIKO EPSON CORP
发明人
NAKAZAWA TAKASHI
分类号
H01L21/84;H01L21/316
主分类号
H01L21/84
代理机构
代理人
主权项
地址
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