| 摘要 |
PURPOSE:To make glow discharge uniform, and to improve efficiency by forming a cathode disposed to a discharge section from parallel sections vertically shaped in parallel with a medium gas flow and an orthogonal section connecting the parallel sections and forming a recessed section at the central section of the orthogonal section. CONSTITUTION:Glow discharge 11 ignites parallel sections 21, 22 and an orthogonal section 23 in a cathode 20. Glow discharge 11 is concentrated to the central section of the orthogonal section 23 by the lowering of the flow rate of a gas flow 7 generated in the orthogonal section 23, but a recessed section 24 toward the upstream direction of the gas flow 7 is formed at the central section of the orthogonal section 23, thus minimizing electric field strength in each section at the central section. Accordingly, glow discharge is not concentrated at the central section of the orthogonal section 23 and is made uniform. |
