| 摘要 |
PURPOSE:To obtain an equipment to control stably the laser output fluctuation of high speed, in a small range, by detecting control quantity supplied to a laser oscillator, differentiating the detected control quantity, and performing negative feedback of the output wherein the differentiated control quantity is operation-adjusted, to a control system of the laser oscillator, via a switching means. CONSTITUTION:The title equipment is provided with the following; a control quantity detecting means to detect a control quantity supplied to a laser oscillator 19, a differentiating means 32 to differentiate an output signal from the control quantity detecting means, an operation-adjusting means to operation-adjust the output signal from the differentiating means 32, and a switching means 34 to turn on and off the output signal from the operation-adjusting means. The output signal from the switching means 34 is fed back to the control system of the laser oscillator 19. For example, the above control quantity detecting means is constituted by the following; a current detecting means 25 to detect the current to be supplied to the laser oscillator 19, a voltage detecting means 30 to detect a voltage supplied to the laser oscillator 19, and a multiplying means 31 to multiply the output signal If from the current detection means 25 and the output signal Vf from the voltage detecting means 30. |
