| 摘要 |
The present invention relates to a process for treating combustible exhaust gases containing poisonous and combustible component gases such as silane and so on, and a combustion system therefor. In the combustion system, the combustible exhaust gases are burnt by downward flames generated from a coaxial, fourfold-pipe burner wherein the flow rates of primary and secondary air are regulated, thereby preventing fine particles of oxides such as silicon dioxide resulting from the combustion of silane, etc. from being deposited onto the nozzle of said burner and allowing deposites, if any, to peel off immediately. Thus, there is no fluctuation in the pressure of the a combustible exhaust gas path, so that constantly stable and continuous combustion is achieved with no difficulty. Removal of dust contained in the exhaust gases comprising fine particles of silicon dioxide, etc. is effected by adding water to the combustion gases and passing the resulting liquid through an orifice on the outlet side of which a pressure equal to or lower than the atmospheric pressure is maintained under a pressure difference across which is at least 2,500 mmAq, thereby trapping the dust in water.
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