| 摘要 |
PURPOSE:To efficiently form a high purity deposited film contg. carbon such as a thin diamond film by separately introducing a compd. contg. carbon and halogen and active seed of film forming starting material into a film forming space and by brining them into a reaction by the action of a red-hot catalytic metal set in the space. CONSTITUTION:A compd. contg. carbon and halogen (from 111) and active seed (from 110) produced from film forming starting material causing chemical interaction with the compd. through an activating energy source 109 are separately introduced into a film forming space 101 for forming a deposited film on a substrate 103. They are brought into a reaction by the action of a heated catalyst 112. The catalyst is a group IV, V or VI metal of the periodic table or a compd. thereof, e.g., Mo. |
