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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6423556(A)
申请公布日期
1989.01.26
申请号
JP19870179103
申请日期
1987.07.20
申请人
FUJITSU LTD
发明人
TSUZUKI NORIHISA
分类号
H01L23/52;H01L21/3205;H01L21/768
主分类号
H01L23/52
代理机构
代理人
主权项
地址
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