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发明名称
RECRYSTALLIZING METHOD
摘要
申请公布号
JPS6422021(A)
申请公布日期
1989.01.25
申请号
JP19870178738
申请日期
1987.07.17
申请人
SUMITOMO METAL MINING CO LTD
发明人
YAMADA ATSUSHI
分类号
H01L21/20;H01L21/263
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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