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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6421943(A)
申请公布日期
1989.01.25
申请号
JP19870177199
申请日期
1987.07.17
申请人
HITACHI LTD
发明人
MIYAZAKI HIROSHI;HONMA YOSHIO;HINODE KENJI;SUZUKI MASAYASU
分类号
H01L21/31;H01L21/28;H01L21/283;H01L21/316;H01L21/3205;H01L23/52;H01L29/43
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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