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经营范围
发明名称
PLASMA CVD DEVICE
摘要
申请公布号
JPS6421080(A)
申请公布日期
1989.01.24
申请号
JP19870179330
申请日期
1987.07.17
申请人
SUMITOMO METAL IND LTD
发明人
UEDA YOICHI;OONITA TEI;TAKIGAWA TOSHIKAZU;TANO SHINJI
分类号
C23C16/50;C23C16/511;H01L21/205;H01L21/31
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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