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发明名称
MOLECULAR BEAM EPITAXY DEVICE
摘要
申请公布号
JPS6418989(A)
申请公布日期
1989.01.23
申请号
JP19870174699
申请日期
1987.07.15
申请人
HITACHI LTD
发明人
MURAI TOSHIYUKI;KANBARA HIDEAKI;ISHIKAWA YUICHI
分类号
H01L21/203;C30B23/08;H01L21/26
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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