DEVICE FOR RFP PLASMA EXPERIMENT,申请号JP19870173915-传众专利搜索

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发明名称	DEVICE FOR RFP PLASMA EXPERIMENT
摘要
申请公布号	JPS6419699(A)	申请公布日期	1989.01.23
申请号	JP19870173915	申请日期	1987.07.14
申请人	MITSUBISHI ELECTRIC CORP	发明人	YAMAGUCHI SAKUTARO
分类号	G21B1/05;G21B1/00;G21B1/11;G21B1/13;H05H1/12	主分类号	G21B1/05
代理机构		代理人
主权项
地址

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